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Wafer spacer

200mm ring: Contactless type
Conductive Inner Ring T-WSR200X

Compatible with NA-8M.
By supporting only the edges, delicate wafers such as bump wafers, surface mount wafers, and glass wafers can be stored and transported securely without contacting the surface. This item is reusable.

Features

  • No contact with wafer surface
  • Low particle
  • Low ion contamination
  • Low outgassing
  • Uses a clean conductive material “ST Poly” 

Specifications

Model number
T-WSR200X
Material
Conductive PC
Surface resistance value
R < 1.0×107Ω
Carton size (500pcs/carton)
430mm × 420mm × 290mm 5.5kg

Ion contamination comparison

Sample Anion Cation
F Cl NO2 Br NO3 SO4 PO4 Li Na NH4 K Mg Ca
T-WSR200X ND ND ND ND ND ND ND ND ND ND ND ND ND

*This data is an actual measurement value, not a guaranteed value

For more information, please feel free to contact us.

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