PRODUCTS
Wafer spacer
200mm ring: Contactless type
Conductive Inner Ring T-WSR200X
Compatible with NA-8M.
By supporting only the edges, delicate wafers such as bump wafers, surface mount wafers, and glass wafers can be stored and transported securely without contacting the surface. This item is reusable.
By supporting only the edges, delicate wafers such as bump wafers, surface mount wafers, and glass wafers can be stored and transported securely without contacting the surface. This item is reusable.
Features
- No contact with wafer surface
- Low particle
- Low ion contamination
- Low outgassing
- Uses a clean conductive material “ST Poly”
Specifications
- Model number:
- T-WSR200X
- Material:
- Conductive PC
- Surface resistance value:
- R < 1.0×107Ω
- Carton size (500pcs/carton):
- 430mm × 420mm × 290mm 5.5kg
Ion contamination comparison
Sample | Anion | Cation | |||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
F | Cl | NO2 | Br | NO3 | SO4 | PO4 | Li | Na | NH4 | K | Mg | Ca | |
T-WSR200X | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND |
*This data is an actual measurement value, not a guaranteed value