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PRODUCTS
Wafer Handling System
Black Inner foam: Conductive Type/PESD
Conductive single-layer foam
PESD foam is a conductive independent foam cushion with low outgassing that uses a special foaming technology that does not use chemical foaming agents.
Features
- Low contamination（ Independent foaming)
- Low out gassing and Low out ion contamination
- Good impact absorption
- Stable conductive performance closed-cell foam.
Specification
- Model number：
- MA-□PESD-1/3/5/10（□：diameter）(1/3/5/10：thickness)
- Material：
- Conductive PE
- Surface resistance value：
- R < 1.0×109Ω
Physical property
| Item | measured value |
|---|---|
| Resistance（23℃ 60%RH | 1.0×106 Ω |
| Charging potential | 0-5 V |
| Decay time (5kV→0V) |
0.01 sec. |
| Particle APC(0.5um<) | 26 counts/pc |
| Outgassing | 0.08 mg/g |
| Ion contamination 【anion】(ppb) | Cl： ND NO3：ND SO4：ND |
| Ion contamination 【cation】(ppb) | Na：ND K：ND |
*This data is an actual measurement value, not a guaranteed value
Resistance comparison
| Sample | Measurement environment |
|---|---|
| 23℃×60%RH | |
| PESD | 6.1×106 |
|
PE Cushion (Competitor A) |
2.7×1010 |
|
PU Cushion (Competitor B) |
4.8×109< |
*This data is an actual measurement value, not a guaranteed value
Triboelectric charging voltage, decay time comparison
| Sample | Triboelectric charging voltage(V) | Decay Time （sec.） | |
|---|---|---|---|
| +5kv→+0V | -5kv→-0V | ||
| PESD | 0-5 | 0.01 | 0.01 |
|
PE Cushion (Competitor A) |
14 – 63 | 0.19-0.22 | 0.19-0.22 |
|
PU Cushion (Competitor B) |
5 – 7 | 0.21-0.24 | 0.21-0.24 |
*This data is an actual measurement value, not a guaranteed value
Particle comparison APC
| Sample | 0.3um≦ | 0.5um≦ | 1um≦ | 3um≦ | 5um≦ | 10um≦ |
|---|---|---|---|---|---|---|
|
PESD (size. 8inch) |
619 | 412 | 266 | 156 | 99 | 30 |
|
PE Cushion (Competitor A) |
1,111 | 786 | 496 | 257 | 189 | 69 |
|
PU Cushion (Competitor B) |
67,959 | 49,003 | 28,445 | 14,533 | 10,999 | 3,357 |
*This data is an actual measurement value, not a guaranteed value
Ion contamination comparison
| Sample | Anion | Cation | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| F | Cl | NO2 | Br | NO3 | SO4 | PO4 | Li | Na | NH4 | K | Mg | Ca | |
| PESD | ND | 2.0 | ND | ND | ND | ND | ND | ND | ND | 10.0 | ND | ND | ND |
|
PE Cushion (Competitor A) |
ND | 12 | ND | ND | 3 | 2 | ND | ND | 7 | ND | 4 | ND | 3 |
|
PU Cushion (Competitor B) |
ND | 28 | 54 | ND | 5 | 4 | 1 | ND | 10 | 2 | 760 | 4 | 18 |
*This data is an actual measurement value, not a guaranteed value
Outgassing comparison
| Sample | Total outgassing | BHT |
|---|---|---|
| 8PESD | 0.08 | ND |
|
PE Cushion (Competitor A) |
0.23 | ND |
|
PU Cushion (Competitor B) |
0.32 | ND |
*This data is an actual measurement value, not a guaranteed value
